Indawo yokusebenzela yama-micro-elekthronikhi enegumbi elincane elihlanzekile uma kuqhathaniswa kanye nerediyasi elinganiselwe yomzila womoya obuyayo osetshenziselwa ukwamukela uhlelo lomoya olubuyayo lwesibili lwesistimu yokupholisa umoya. Lolu hlelo luvame ukusetshenziswa kuamagumbi ahlanzekilekwezinye izimboni ezifana nemithi kanye nokunakekelwa kwezokwelapha. Ngenxa yokuthi umthamo wokungenisa umoya ukuze uhlangabezane nezidingo zomswakama ohlanzekile wezinga lokushisa legumbi ngokuvamile ungaphansi kakhulu kunomthamo wokungenisa umoya odingekayo ukuze ufinyelele izinga lokuhlanzeka, ngakho-ke, umehluko wezinga lokushisa phakathi komoya wokunikezela nomoya obuyayo mncane. Uma kusetshenziswa uhlelo oluyisisekelo lokubuyisela umoya, umehluko wezinga lokushisa phakathi kwendawo yokuhlinzeka komoya kanye nendawo yamazolo yeyunithi ye-air conditioning inkulu, ukufudumeza kwesibili kuyadingeka, okuholela ekushiseni okubandayo enqubweni yokwelashwa komoya kanye nokusetshenziswa kwamandla okwengeziwe. . Uma uhlelo lomoya wesibili olubuyayo lusetshenziswa, umoya wesibili wokubuya ungasetshenziswa esikhundleni sokushisa kwesibili kwesimiso somoya esiyisisekelo sokubuya. Nakuba ukulungiswa kwesilinganiso somoya obuyayo oyinhloko kanye nesesibili kuzwela kancane kunokulungiswa kokushisa kwesibili, isikimu somoya sokubuya sesibili siye saqashelwa kabanzi njengesilinganiso sokulondoloza amandla omoya kumaworkshop amancane naphakathi nendawo ahlanzekile kagesi. .
Thatha indawo yokusebenzela ehlanzekile ye-ISO class 6 microelectronics njengesibonelo, indawo yokusebenzela ehlanzekile engu-1 000 m2, ubude bosilingi bungamamitha amathathu. Imingcele yomklamo wangaphakathi izinga lokushisa tn= (23±1) ℃, umswakama ohlobene φn=50%±5%; Umthamo wokunikezwa komoya wokuklama ungu-171,000 m3/h, cishe izikhathi ezingu-57 h-1 zokushintshana komoya, futhi ivolumu yomoya omusha ingu-25 500 m3/h (lapho inqubo yokukhipha umoya ivolumu ingu-21 000 m3/h, kanti okunye I-positive pressure leak volume air). Umthwalo wokushisa ozwakalayo endaweni yokusebenzela ehlanzekile ngu-258 kW (258 W/m2), isilinganiso sokushisa/nomswakama we-air conditioner ngu-ε=35 000 kJ/kg, futhi umehluko wokushisa womoya wokubuya wegumbi ngu-4.5 ℃. Ngalesi sikhathi, umthamo womoya wokubuya oyinhloko we
Lokhu okwamanje kuyindlela evame ukusetshenziswa kakhulu yokuhlanza umoya we-air conditioning embonini ye-microelectronics ekamelweni elihlanzekile, lolu hlobo lwesistimu lungahlukaniswa ikakhulukazi ngezinhlobo ezintathu: I-AHU + FFU; MAU+AHU+FFU; I-MAU+DC (Ikhoyili eyomile) +FFU. Ngayinye inezinzuzo zayo kanye nebubi kanye nezindawo ezifanele, umphumela wokonga amandla ikakhulukazi uncike ekusebenzeni kwesihlungi kanye nefeni kanye nezinye izinto zokusebenza.
1) Uhlelo lwe-AHU+FFU.
Lolu hlobo lwemodi yesistimu lusetshenziswa embonini ye-microelectronics "njengendlela yokuhlukanisa isimo somoya kanye nesigaba sokuhlanza". Kungase kube nezimo ezimbili: enye iwukuthi uhlelo lwe-air conditioning lusebenza kuphela ngomoya ohlanzekile, futhi umoya ohlanzekile ophethwe uthwala konke ukushisa nomswakama wekamelo elihlanzekile futhi usebenze njengomoya ongeziwe ukuze ulinganise umoya wokuqeda kanye nokuvuza kwengcindezi enhle. wekamelo elihlanzekile, lolu hlelo lubizwa nangokuthi uhlelo lwe-MAU + FFU; Okunye ukuthi ivolumu yomoya ohlanzekile iyodwa ayanele ukuhlangabezana nezidingo zomthwalo obandayo nokushisa wekamelo elihlanzekile, noma ngenxa yokuthi umoya ohlanzekile ucutshungulwa kusukela endaweni yangaphandle ukuya endaweni yamazolo umehluko othize we-enthalpy womshini odingekayo mkhulu kakhulu. , kanye nengxenye yomoya wasendlini (okulingana nomoya obuyayo) ibuyiselwa endaweni yokwelashwa kwesimo somoya, exutshwe nomoya ohlanzekile wokwelapha ukushisa nokuswakama, bese ithunyelwa ku-plenum yokuphakelwa komoya. Kuhlanganiswe nomoya osele ohlanzekile wokubuyisela igumbi (okulingana nomoya wesibili obuyayo), ungena kuyunithi ye-FFU bese uyithumela ekamelweni elihlanzekile. Kusukela ngo-1992 kuya ku-1994, umbhali wesibili waleli phepha wabambisana nenkampani yaseSingapore futhi waholela abafundi abangaphezu kwe-10 ukuba babambe iqhaza ekwakhiweni kwe-US-Hong Kong joint venture i-SAE Electronics Factory, eyamukela uhlobo lokugcina lokuhlanza umoya kanye ne-air conditioning. uhlelo lokungenisa umoya. Le phrojekthi inegumbi elihlanzekile le-ISO Class 5 elicishe libe ngu-6,000 m2 (1,500 m2 elinikezwe inkontileka yi-Japan Atmospheric Agency). Igumbi le-air conditioning lihlelwe ngokuhambisana nohlangothi lwegumbi elihlanzekile eduze nodonga lwangaphandle, futhi luncike kuphela ephasishi. Umoya ohlanzekile, umoya wokukhipha umoya kanye namapayipi omoya obuyayo mafushane futhi ahlelwe kahle.
2) Uhlelo lwe-MAU+AHU+FFU.
Lesi sixazululo sivame ukutholakala ezitshalweni ze-microelectronics ezinezidingo eziningi zokushisa nomswakama kanye nomehluko omkhulu ekulayisheni ukushisa nomswakama, futhi izinga lokuhlanzeka nalo liphezulu. Ehlobo, umoya ohlanzekile uyapholiswa futhi ususwe umswakama endaweni engaguquki yepharamitha. Ngokuvamile kuyafaneleka ukwelapha umoya omusha endaweni yokuphambana komugqa we-isometric enthalpy kanye nomugqa womswakama ohlobene no-95% wegumbi elihlanzekile elinezinga lokushisa elimele kanye nomswakama noma igumbi elihlanzekile elinomthamo omkhulu womoya omusha. Umthamo womoya we-MAU unqunywa ngokwezidingo zegumbi ngalinye elihlanzekile ukuze ugcwalise umoya, futhi usatshalaliswa ku-AHU yegumbi ngalinye elihlanzekile ngamapayipi ngokuya ngevolumu yomoya omusha odingekayo, futhi ixutshwe nomoya othile obuyayo ongaphakathi ukuze kushiswe. kanye nokwelashwa komswakama. Le yunithi ithwala wonke umthwalo wokushisa nomswakama kanye nengxenye yomthwalo omusha we-rheumatism wegumbi elihlanzekile elihlinzekayo. Umoya ophathwa yi-AHU ngayinye uthunyelwa ku-plenum yomoya wokuhlinzeka ekamelweni ngalinye elihlanzekile, futhi ngemva kokuxubana kwesibili nomoya wokubuyisela wangaphakathi, uthunyelwa ekamelweni yiyunithi ye-FFU.
Inzuzo eyinhloko yesisombululo se-MAU+AHU+FFU ukuthi ngaphezu kokuqinisekisa ukuhlanzeka nokucindezela okuhle, iphinde iqinisekise amazinga okushisa ahlukene kanye nomswakama ohlobene odingekayo ekukhiqizeni inqubo ngayinye yegumbi elihlanzekile. Kodwa-ke, imvamisa ngenxa yenani le-AHU elimisiwe, indawo yegumbi ithatha indawo enkulu, igumbi elihlanzekile lomoya omusha, umoya wokubuya, amapayipi okuhambisa komoya anqamula, athatha indawo enkulu, ukwakheka kuyinkinga kakhulu, ukugcinwa nokuphatha kunzima kakhulu. futhi eziyinkimbinkimbi, ngakho-ke, azikho izidingo ezikhethekile ngangokunokwenzeka ukugwema ukusetshenziswa.
Isikhathi sokuthumela: Mar-26-2024